Micron Document




Plasma processing
──────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────────
top
Plasma processing is a plasma-based material processing technology that aims at modifying the chemical and physical properties of a surface.cite-ref-1[1]

Plasma processing techniques include:

• Plasma modification


References

cite-note-11. citerefnational-research-council1991National Research Council (1991). Plasma Processing of Materials: Scientific Opportunities and Technological Challenges. Washington, DC: National Academies Press. doi:10.17226/1875. ISBN 978-0-309-04597-1.